Hyunwoong Ko

Tao Han, Suk Ki Lee, Hyunwoong Ko

Artificial intelligence-driven semiconductor manufacturing increasingly operates at nanometer and angstrom scales, where precise process control depends on accurate and timely metrology. However, physical metrology is limited by measurement latency, cost, and sampling constraints, restricting its scalability in high-volume production. Virtual metrology (VM) has emerged as an effective alternative by predicting wafer-level characteristics from equipment sensor data. Despite recent advances, many existing VM models remain correlation-driven and lack the ability to capture structured dependencies among heterogeneous process variables, while providing limited interpretability. This study presents a graph attention-based VM framework for film deposition processes that integrates temporal feature learning with structured parameter-layer dependency modeling. The proposed approach represents each step-parameter pair as a node and extracts temporal embeddings from high-frequency equipment traces using convolutional feature encoders. A parameter-to-layer graph attention mechanism is employed to model directional dependencies, enabling each film layer to aggregate relevant process information. The framework is evaluated using industrial deposition data collected from production wafers, where the model predicts film thickness from multivariate sensor signals. Experimental results demonstrate improved predictive performance compared to baseline models. In addition, analysis of the learned attention weights reveals interpretable parameter-layer relationships consistent with physical process behavior, capturing dominant process factors and temporal dependencies across deposition stages. These results indicate that the proposed framework enhances prediction accuracy and provides meaningful insight into process dynamics, supporting effective monitoring and optimization in semiconductor manufacturing.

Suk Ki Lee, Venkata Sai Deepak Mutta, Hyunwoong Ko

Coordinating multiple robots in shared environments requires generating feasible trajectories for each agent while accounting for interactions among agents. Centralized planning approaches become difficult to scale as the number of robots increases, while decentralized approaches that allow each agent to plan independently do not inherently account for inter-agent interactions. This paper presents a framework for coordinated multi-robot motion planning that combines decentralized generative trajectory planning with multi-agent reinforcement learning (MARL)-based coordination. Each robot independently generates candidate trajectories using a diffusion model trained on single-agent motion data, leveraging the generative model's ability to produce feasible and diverse trajectories. To reduce conflicts between agents, a centralized value function trained via MARL guides the reverse diffusion process through gradient-based steering, enabling interaction-aware trajectory generation without centralized joint planning or retraining of the generative model. This guidance follows an exponential tilting formulation, in which the value function biases the denoising distribution toward trajectories with higher expected multi-agent return. The framework is evaluated in a simulated maze environment with four mobile robots. Experimental results show that the proposed value-guided diffusion planning reduces the inter-agent interference rate from 55.4% to 41.8%, demonstrating that coordination can be effectively achieved while preserving the scalability of decentralized trajectory generation. These results suggest that MARL-based value guidance can effectively introduce coordination into decentralized generative planners without requiring a fully joint multi-robot model.

Hyunwoong Ko, Kichang Yang, Minho Ryu et al.

Polyglot is a pioneering project aimed at enhancing the non-English language performance of multilingual language models. Despite the availability of various multilingual models such as mBERT (Devlin et al., 2019), XGLM (Lin et al., 2022), and BLOOM (Scao et al., 2022), researchers and developers often resort to building monolingual models in their respective languages due to the dissatisfaction with the current multilingual models non-English language capabilities. Addressing this gap, we seek to develop advanced multilingual language models that offer improved performance in non-English languages. In this paper, we introduce the Polyglot Korean models, which represent a specific focus rather than being multilingual in nature. In collaboration with TUNiB, our team collected 1.2TB of Korean data meticulously curated for our research journey. We made a deliberate decision to prioritize the development of Korean models before venturing into multilingual models. This choice was motivated by multiple factors: firstly, the Korean models facilitated performance comparisons with existing multilingual models; and finally, they catered to the specific needs of Korean companies and researchers. This paper presents our work in developing the Polyglot Korean models, which propose some steps towards addressing the non-English language performance gap in multilingual language models.

Mutahar Safdar, Jiarui Xie, Hyunwoong Ko et al.

Data-driven research in Additive Manufacturing (AM) has gained significant success in recent years. This has led to a plethora of scientific literature to emerge. The knowledge in these works consists of AM and Artificial Intelligence (AI) contexts that have not been mined and formalized in an integrated way. Moreover, no tools or guidelines exist to support data-driven knowledge transfer from one context to another. As a result, data-driven solutions using specific AI techniques are being developed and validated only for specific AM process technologies. There is a potential to exploit the inherent similarities across various AM technologies and adapt the existing solutions from one process or problem to another using AI, such as Transfer Learning. We propose a three-step knowledge transferability analysis framework in AM to support data-driven AM knowledge transfer. As a prerequisite to transferability analysis, AM knowledge is featurized into identified knowledge components. The framework consists of pre-transfer, transfer, and post-transfer steps to accomplish knowledge transfer. A case study is conducted between flagship metal AM processes. Laser Powder Bed Fusion (LPBF) is the source of knowledge motivated by its relative matureness in applying AI over Directed Energy Deposition (DED), which drives the need for knowledge transfer as the less explored target process. We show successful transfer at different levels of the data-driven solution, including data representation, model architecture, and model parameters. The pipeline of AM knowledge transfer can be automated in the future to allow efficient cross-context or cross-process knowledge exchange.

Fatemeh Elhambakhsh, Gaurav Ameta, Aditi Roy et al.

Machining process planning (MP) is inherently complex due to structural and geometrical dependencies among part features and machining operations. A key challenge lies in capturing dynamic interdependencies that evolve with distinct part geometries as operations are performed. Machine learning has been applied to address challenges in MP, such as operation selection and machining sequence prediction. Dynamic graph learning (DGL) has been widely used to model dynamic systems, thanks to its ability to integrate spatio-temporal relationships. However, in MP, while existing DGL approaches can capture these dependencies, they fail to incorporate three-dimensional (3D) geometric information of parts and thus lack domain awareness in predicting machining operation sequences. To address this limitation, we propose MP-GFormer, a 3D-geometry-aware dynamic graph transformer that integrates evolving 3D geometric representations into DGL through an attention mechanism to predict machining operation sequences. Our approach leverages StereoLithography surface meshes representing the 3D geometry of a part after each machining operation, with the boundary representation method used for the initial 3D designs. We evaluate MP-GFormer on a synthesized dataset and demonstrate that the method achieves improvements of 24\% and 36\% in accuracy for main and sub-operation predictions, respectively, compared to state-of-the-art approaches.

Kanana LLM Team, Yunju Bak, Hojin Lee et al.

We introduce Kanana, a series of bilingual language models that demonstrate exceeding performance in Korean and competitive performance in English. The computational cost of Kanana is significantly lower than that of state-of-the-art models of similar size. The report details the techniques employed during pre-training to achieve compute-efficient yet competitive models, including high quality data filtering, staged pre-training, depth up-scaling, and pruning and distillation. Furthermore, the report outlines the methodologies utilized during the post-training of the Kanana models, encompassing supervised fine-tuning and preference optimization, aimed at enhancing their capability for seamless interaction with users. Lastly, the report elaborates on plausible approaches used for language model adaptation to specific scenarios, such as embedding, retrieval augmented generation, and function calling. The Kanana model series spans from 2.1B to 32.5B parameters with 2.1B models (base, instruct, embedding) publicly released to promote research on Korean language models.

Fatemeh Elhambakhsh, Daniele Grandi, Hyunwoong Ko

The conceptual design phase represents a critical early stage in the product development process, where designers generate potential solutions that meet predefined design specifications based on functional requirements. Functional modeling, a foundational aspect of this phase, enables designers to reason about product functions before specific structural details are determined. A widely adopted approach to functional modeling is the Function-Behavior-Structure (FBS) framework, which supports the transformation of functional intent into behavioral and structural descriptions. However, the effectiveness of function-based design is often hindered by the lack of well-structured and comprehensive functional data. This scarcity can negatively impact early design decision-making and hinder the development of accurate behavioral models. Recent advances in Large Language Models (LLMs), such as those based on GPT architectures, offer a promising avenue to address this gap. LLMs have demonstrated significant capabilities in language understanding and natural language processing (NLP), making them suitable for automated classification tasks. This study proposes a novel LLM-based domain adaptation (DA) framework using fine-tuning for the automated classification of mechanical assembly parts' functions. By fine-tuning LLMs on domain-specific datasets, the traditionally manual and subjective process of function annotation can be improved in both accuracy and consistency. A case study demonstrates fine-tuning GPT-3.5 Turbo on data from the Oregon State Design Repository (OSDR), and evaluation on the A Big CAD (ABC) dataset shows that the domain-adapted LLM can generate high-quality functional data, enhancing the semantic representation of mechanical parts and supporting more effective design exploration in early-phase engineering.

Suk Ki Lee, Hyunwoong Ko

Dynamic manufacturing processes exhibit complex characteristics defined by time-varying parameters, nonlinear behaviors, and uncertainties. These characteristics require sophisticated in-situ monitoring techniques utilizing multimodal sensor data and adaptive control systems that can respond to real-time feedback while maintaining product quality. Recently, generative machine learning (ML) has emerged as a powerful tool for modeling complex distributions and generating synthetic data while handling these manufacturing uncertainties. However, adopting these generative technologies in dynamic manufacturing systems lacks a functional control-oriented perspective to translate their probabilistic understanding into actionable process controls while respecting constraints. This review presents a functional classification of Prediction-Based, Direct Policy, Quality Inference, and Knowledge-Integrated approaches, offering a perspective for understanding existing ML-enhanced control systems and incorporating generative ML. The analysis of generative ML architectures within this framework demonstrates control-relevant properties and potential to extend current ML-enhanced approaches where conventional methods prove insufficient. We show generative ML's potential for manufacturing control through decision-making applications, process guidance, simulation, and digital twins, while identifying critical research gaps: separation between generation and control functions, insufficient physical understanding of manufacturing phenomena, and challenges adapting models from other domains. To address these challenges, we propose future research directions aimed at developing integrated frameworks that combine generative ML and control technologies to address the dynamic complexities of modern manufacturing systems.

Suk Ki Lee, Ronnie F. P. Stone, Max Gao et al.

Manufacturing processes are inherently dynamic and uncertain, with varying parameters and nonlinear behaviors, making robust control essential for maintaining quality and reliability. Traditional control methods often fail under these conditions due to their reactive nature. Model Predictive Control (MPC) has emerged as a more advanced framework, leveraging process models to predict future states and optimize control actions. However, MPC relies on simplified models that often fail to capture complex dynamics, and it struggles with accurate state estimation and handling the propagation of uncertainty in manufacturing environments. Machine learning (ML) has been introduced to enhance MPC by modeling nonlinear dynamics and learning latent representations that support predictive modeling, state estimation, and optimization. Yet existing ML-driven MPC approaches remain deterministic and correlation-focused, motivating the exploration of generative. Generative ML offers new opportunities by learning data distributions, capturing hidden patterns, and inherently managing uncertainty, thereby complementing MPC. This review highlights five representative methods and examines how each has been integrated into MPC components, including predictive modeling, state estimation, and optimization. By synthesizing these cases, we outline the common ways generative ML can systematically enhance MPC and provide a framework for understanding its potential in diverse manufacturing processes. We identify key research gaps, propose future directions, and use a representative case to illustrate how generative ML-driven MPC can extend broadly across manufacturing. Taken together, this review positions generative ML not as an incremental add-on but as a transformative approach to reshape predictive control for next-generation manufacturing systems.

Tao Han, Zahra Taheri, Hyunwoong Ko

Semiconductor manufacturing relies heavily on film deposition processes, such as Chemical Vapor Deposition and Physical Vapor Deposition. These complex processes require precise control to achieve film uniformity, proper adhesion, and desired functionality. Recent advancements in Physics-Informed Neural Networks (PINNs), an innovative machine learning (ML) approach, have shown significant promise in addressing challenges related to process control, quality assurance, and predictive modeling within semiconductor film deposition and other manufacturing domains. This paper provides a comprehensive review of ML applications targeted at semiconductor film deposition processes. Through a thematic analysis, we identify key trends, existing limitations, and research gaps, offering insights into both the advantages and constraints of current methodologies. Our structured analysis aims to highlight the potential integration of these ML techniques to enhance interpretability, accuracy, and robustness in film deposition processes. Additionally, we examine state-of-the-art PINN methods, discussing strategies for embedding physical knowledge, governing laws, and partial differential equations into advanced neural network architectures tailored for semiconductor manufacturing. Based on this detailed review, we propose novel research directions that integrate the strengths of PINNs to significantly advance film deposition processes. The contributions of this study include establishing a clear pathway for future research in integrating physics-informed ML frameworks, addressing existing methodological gaps, and ultimately improving precision, scalability, and operational efficiency within semiconductor manufacturing.