Lei Zhuang

Zichun Xu, Zhaomin Wang, Yuntao Li et al.

For peg-in-hole tasks, humans rely on binocular visual perception to locate the peg above the hole surface and then proceed with insertion. This paper draws insights from this behavior to enable agents to learn efficient assembly strategies through visual reinforcement learning. Hence, we propose a Separate Primitive Policy (S2P) to learn how to derive location and insertion actions simultaneously. S2P is compatible with model-free reinforcement learning algorithms. Ten insertion tasks featuring different polygons are developed as benchmarks for evaluations. Simulation experiments show that S2P can boost the sample efficiency and success rate even with force constraints. Real-world experiments are also performed to verify the feasibility of S2P. Ablations are finally given to discuss the generalizability of S2P and some factors that affect its performance.

Yuting Hu, Lei Zhuang, Hua Xiang et al.

As integrated circuit (IC) dimensions shrink below the lithographic wavelength, optical lithography faces growing challenges from diffraction and process variability. Model-based optical proximity correction (OPC) and inverse lithography technique (ILT) remain indispensable but computationally expensive, requiring repeated simulations that limit scalability. Although deep learning has been applied to mask optimization, existing datasets often rely on synthetic layouts, disregard standard-cell hierarchy, and neglect the surrounding contexts around the mask optimization targets, thereby constraining their applicability to practical mask optimization. To advance deep learning for cell- and context-aware mask optimization, we present MaskOpt, a large-scale benchmark dataset constructed from real IC designs at the 45$\mathrm{nm}$ node. MaskOpt includes 104,714 metal-layer tiles and 121,952 via-layer tiles. Each tile is clipped at a standard-cell placement to preserve cell information, exploiting repeated logic gate occurrences. Different context window sizes are supported in MaskOpt to capture the influence of neighboring shapes from optical proximity effects. We evaluate state-of-the-art deep learning models for IC mask optimization to build up benchmarks, and the evaluation results expose distinct trade-offs across baseline models. Further context size analysis and input ablation studies confirm the importance of both surrounding geometries and cell-aware inputs in achieving accurate mask generation.

Lei Zhuang, Jingdong Zhao, Yuntao Li et al.

Sampling-based motion planning (SBMP) algorithms are renowned for their robust global search capabilities. However, the inherent randomness in their sampling mechanisms often result in inconsistent path quality and limited search efficiency. In response to these challenges, this work proposes a novel deep learning-based motion planning framework, named Transformer-Enhanced Motion Planner (TEMP), which synergizes an Environmental Information Semantic Encoder (EISE) with a Motion Planning Transformer (MPT). EISE converts environmental data into semantic environmental information (SEI), providing MPT with an enriched environmental comprehension. MPT leverages an attention mechanism to dynamically recalibrate its focus on SEI, task objectives, and historical planning data, refining the sampling node generation. To demonstrate the capabilities of TEMP, we train our model using a dataset comprised of planning results produced by the RRT*. EISE and MPT are collaboratively trained, enabling EISE to autonomously learn and extract patterns from environmental data, thereby forming semantic representations that MPT could more effectively interpret and utilize for motion planning. Subsequently, we conducted a systematic evaluation of TEMP's efficacy across diverse task dimensions, which demonstrates that TEMP achieves exceptional performance metrics and a heightened degree of generalizability compared to state-of-the-art SBMPs.

Yuting Hu, Lei Zhuang, Chen Wang et al.

As feature sizes shrink to the nanometer scale, accurately transferring circuit patterns from photomasks to silicon wafers becomes increasingly challenging. Optical proximity correction (OPC) is widely used to ensure pattern fidelity and manufacturability. Recent generative mask optimization models based on encoder-decoder architecture can synthesize near-optimal masks, serving as fast machine learning (ML) surrogates for traditional OPC. However, these models often fail to capture the geometric transformations from target layouts to mask patterns, leading to suboptimal quality. In this work, we formulate mask generation as a sequence of morphological operations on local layout features and propose \textit{MorphOPC}, a multi-scale hierarchical model with neural morphological modules to learn these transformations. Experiments on edge-based OPC and ILT benchmarks across metal and via layers show that \textit{MorphOPC} consistently outperforms state-of-the-art methods, achieving higher printing fidelity and lower manufacturing cost, demonstrating strong potential for scalable mask optimization.

Zichun Xu, Yuntao Li, Zhaomin Wang et al.

Depth information is robust to scene appearance variations and inherently carries 3D spatial details. In this paper, a visual backbone based on the vision transformer is proposed to fuse RGB and depth modalities for enhancing generalization. Different modalities are first processed by separate CNN stems, and the combined convolutional features are delivered to the scalable vision transformer to obtain visual representations. Moreover, a contrastive unsupervised learning scheme is designed with masked and unmasked tokens to accelerate the sample efficiency during the reinforcement learning process. Simulation results demonstrate that our visual backbone can focus more on task-related regions and exhibit better generalization in unseen scenarios. For sim2real transfer, a flexible curriculum learning schedule is developed to deploy domain randomization over training processes. Finally, the feasibility of our model is validated to perform real-world manipulation tasks via zero-shot transfer.