Yu Li

Yuqi Jiang, Yumeng Liu, Zimu Li et al.

As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance. However, lithography is a continuous physical process involving mask optimization, optical imaging, resist exposure, and development, which existing models fail to capture. To overcome this limitation, we present LithoDreamer, the first physics-informed World Model (WM) framework for computational lithography, which formulates the ``Layout-Mask-Resist Image-After Development Image (ADI)'' pipeline as a decision-driven multi-step evolution system. LithoDreamer captures feature changes between adjacent states to model stage-specific physics-informed latent spaces, in which it controls process intervention exploration and drives subsequent state transitions. To achieve interpretable intervention optimization without continuous supervision, we propose a contrastive variational optimization paradigm that contrasts the latent differences between intervention paths with variational evolution constraints, guiding the model to generate evolutions consistent with real lithography physics. Experiments show LithoDreamer achieves state-of-the-art performance in forward evolution and inverse planning. Our lithography dataset is publicly available at GitHub (https://github.com/7jiangyq/lithodreamer.git).

Qicheng Zhao, Yu Li, Qi Sun et al.

The adoption of powerful diffusion models is hindered by their significant inference latency. Recent ``cache-then-forecast'' schemes alleviate this issue by accelerating DiTs using derivative-based polynomials, but they suffer from severe quality degradation at high acceleration ratios. Our analysis reveals its root cause: the discrete extrapolation performed on representations that are misaligned with the continuous diffusion trajectory and are numerically unstable. Thus, accelerated DiTs suffer from accumulated spatial errors, noisy derivative amplification, and high-order instability. We therefore reformulate accelerated inference as stable macro-trajectory extrapolation in ordinary differential equation (ODE) space. Instead of predicting intermediate features, we align forecasting with the model's Global Drift (GD), i.e., the end-to-end state evolution, thereby eliminating feature inconsistency and memory overhead. However, even this smooth macro-trajectory remains vulnerable to the derivative fallacy: its higher-order temporal derivatives are intrinsically noisy. Thus, we introduce a derivative-free barycentric Lagrange extrapolator to effectively bypass derivative instability and approximation error. We further propose a bounded Phase Mapping that regularizes the extrapolation domain, suppressing oscillatory error growth. These elements collectively constitute ResilPhase, a noise-resilient acceleration framework. Experiments on FLUX.1-dev and HunyuanVideo demonstrate state-of-the-art fidelity under aggressive acceleration ratios.