Manuel Guizar-Sicairos

Iksung Kang, Yi Jiang, Mirko Holler et al.

Three-dimensional inspection of nanostructures such as integrated circuits is important for security and reliability assurance. Two scanning operations are required: ptychographic to recover the complex transmissivity of the specimen; and rotation of the specimen to acquire multiple projections covering the 3D spatial frequency domain. Two types of rotational scanning are possible: tomographic and laminographic. For flat, extended samples, for which the full 180 degree coverage is not possible, the latter is preferable because it provides better coverage of the 3D spatial frequency domain compared to limited-angle tomography. It is also because the amount of attenuation through the sample is approximately the same for all projections. However, both techniques are time consuming because of extensive acquisition and computation time. Here, we demonstrate the acceleration of ptycho-laminographic reconstruction of integrated circuits with 16-times fewer angular samples and 4.67-times faster computation by using a physics-regularized deep self-supervised learning architecture. We check the fidelity of our reconstruction against a densely sampled reconstruction that uses full scanning and no learning. As already reported elsewhere [Zhou and Horstmeyer, Opt. Express, 28(9), pp. 12872-12896], we observe improvement of reconstruction quality even over the densely sampled reconstruction, due to the ability of the self-supervised learning kernel to fill the missing cone.

Luis Barba, Johannes Kirschner, Tomas Aidukas et al.

We introduce Diffusion Active Learning, a novel approach that combines generative diffusion modeling with data-driven sequential experimental design to adaptively acquire data for inverse problems. Although broadly applicable, we focus on scientific computed tomography (CT) for experimental validation, where structured prior datasets are available, and reducing data requirements directly translates to shorter measurement times and lower X-ray doses. We first pre-train an unconditional diffusion model on domain-specific CT reconstructions. The diffusion model acts as a learned prior that is data-dependent and captures the structure of the underlying data distribution, which is then used in two ways: It drives the active learning process and also improves the quality of the reconstructions. During the active learning loop, we employ a variant of diffusion posterior sampling to generate conditional data samples from the posterior distribution, ensuring consistency with the current measurements. Using these samples, we quantify the uncertainty in the current estimate to select the most informative next measurement. Our results show substantial reductions in data acquisition requirements, corresponding to lower X-ray doses, while simultaneously improving image reconstruction quality across multiple real-world tomography datasets.