Zachary S. Ballard

h-index17
2papers
1,488citations

2 Papers

3.3OPTICSDec 1, 2020
Neural network-based on-chip spectroscopy using a scalable plasmonic encoder

Calvin Brown, Artem Goncharov, Zachary Ballard et al.

Conventional spectrometers are limited by trade-offs set by size, cost, signal-to-noise ratio (SNR), and spectral resolution. Here, we demonstrate a deep learning-based spectral reconstruction framework, using a compact and low-cost on-chip sensing scheme that is not constrained by the design trade-offs inherent to grating-based spectroscopy. The system employs a plasmonic spectral encoder chip containing 252 different tiles of nanohole arrays fabricated using a scalable and low-cost imprint lithography method, where each tile has a unique geometry and, thus, a unique optical transmission spectrum. The illumination spectrum of interest directly impinges upon the plasmonic encoder, and a CMOS image sensor captures the transmitted light, without any lenses, gratings, or other optical components in between, making the entire hardware highly compact, light-weight and field-portable. A trained neural network then reconstructs the unknown spectrum using the transmitted intensity information from the spectral encoder in a feed-forward and non-iterative manner. Benefiting from the parallelization of neural networks, the average inference time per spectrum is ~28 microseconds, which is orders of magnitude faster compared to other computational spectroscopy approaches. When blindly tested on unseen new spectra (N = 14,648) with varying complexity, our deep-learning based system identified 96.86% of the spectral peaks with an average peak localization error, bandwidth error, and height error of 0.19 nm, 0.18 nm, and 7.60%, respectively. This system is also highly tolerant to fabrication defects that may arise during the imprint lithography process, which further makes it ideal for applications that demand cost-effective, field-portable and sensitive high-resolution spectroscopy tools.

9.0CVJan 30, 2019
Resolution enhancement in scanning electron microscopy using deep learning

Kevin de Haan, Zachary S. Ballard, Yair Rivenson et al.

We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in low-resolution SEM images and comparing them with the accurately co-registered high-resolution SEM images of the same samples. Through spatial frequency analysis, we also report that our method generates images with frequency spectra matching higher resolution SEM images of the same fields-of-view. By using this technique, higher resolution SEM images can be taken faster, while also reducing both electron charging and damage to the samples.