Xuyuan Xiong

LG
h-index5
4papers
12citations
Novelty64%
AI Score51

4 Papers

LGMay 29
LithoGRPO: Fast Inverse Lithography via GRPO Reinforced Flow Matching

Yao Lai, Xuyuan Xiong, Zeyue Xue et al.

In semiconductor manufacturing, lithography projects circuit layouts onto silicon wafers through an optical mask. As circuit features shrink below the wavelength of light, optical diffraction causes the printed patterns to deviate from their intended layouts. Inverse Lithography Technology (ILT) addresses this challenge by generating optimized masks that enhance the fidelity of pattern transfer onto wafers. While ILT resembles an image synthesis task, its reliance on explicit physical metrics for mask evaluation limits the applicability of existing generative models. We introduce LithoGRPO, an ILT framework that integrates the flow-matching paradigm with GRPO-based reinforcement learning (RL) fine-tuning, enabling efficient exploration of diverse masks for a given target layout. Unlike purely generative or optimization-based approaches, RL in LithoGRPO exploits the explicitly defined, physics-based reward function of ILT, enabling optimization under complex, process-aware constraints. To the best of our knowledge, this is the first framework that unifies flow matching and RL for mask optimization. To improve RL sampling efficiency, we propose a fast shot-counting algorithm for manufacturability evaluation, achieving over 130x speedup while preserving the mask ranking of the traditional shot-count metric. Extensive experiments demonstrate that LithoGRPO achieves state-of-the-art performance over both optimization-based and learning-based methods, while maintaining efficient mask generation.

CLSep 28, 2024Code
HYBRIDMIND: Meta Selection of Natural Language and Symbolic Language for Enhanced LLM Reasoning

Simeng Han, Tianyu Liu, Chuhan Li et al.

LLMs approach logical and mathematical reasoning through natural or symbolic languages. While natural language offers human-accessible flexibility but suffers from ambiguity, symbolic reasoning provides precise, machine-executable inferences at the cost of strict domain constraints. We introduce HYBRIDMIND, an adaptive strategy that selects the optimal reasoning approach for each reasoning problem. Through extensive experiments, we evaluate both prompting-based approaches with state-of-the-art LLMs and fine-tuned open-source models. We find that fine-tuning LLaMA-3.1-8B-Instruct as a meta-selector outperforms GPT-4o's natural language reasoning by 4.4\% on FOLIO and 1.3\% on MATH. More notably, using GPT-3.5-turbo as a prompted meta-selector yields a 10\% improvement on FOLIO's challenging subset compared to GPT-4o. We will release our code and data to support future research.

LGJun 16, 2025
Taming Polysemanticity in LLMs: Provable Feature Recovery via Sparse Autoencoders

Siyu Chen, Heejune Sheen, Xuyuan Xiong et al.

We study the challenge of achieving theoretically grounded feature recovery using Sparse Autoencoders (SAEs) for the interpretation of Large Language Models. Existing SAE training algorithms often lack rigorous mathematical guarantees and suffer from practical limitations such as hyperparameter sensitivity and instability. To address these issues, we first propose a novel statistical framework for the feature recovery problem, which includes a new notion of feature identifiability by modeling polysemantic features as sparse mixtures of underlying monosemantic concepts. Building on this framework, we introduce a new SAE training algorithm based on ``bias adaptation'', a technique that adaptively adjusts neural network bias parameters to ensure appropriate activation sparsity. We theoretically \highlight{prove that this algorithm correctly recovers all monosemantic features} when input data is sampled from our proposed statistical model. Furthermore, we develop an improved empirical variant, Group Bias Adaptation (GBA), and \highlight{demonstrate its superior performance against benchmark methods when applied to LLMs with up to 1.5 billion parameters}. This work represents a foundational step in demystifying SAE training by providing the first SAE algorithm with theoretical recovery guarantees, thereby advancing the development of more transparent and trustworthy AI systems through enhanced mechanistic interpretability.

LGOct 22, 2025
SPOT: Scalable Policy Optimization with Trees for Markov Decision Processes

Xuyuan Xiong, Pedro Chumpitaz-Flores, Kaixun Hua et al.

Interpretable reinforcement learning policies are essential for high-stakes decision-making, yet optimizing decision tree policies in Markov Decision Processes (MDPs) remains challenging. We propose SPOT, a novel method for computing decision tree policies, which formulates the optimization problem as a mixed-integer linear program (MILP). To enhance efficiency, we employ a reduced-space branch-and-bound approach that decouples the MDP dynamics from tree-structure constraints, enabling efficient parallel search. This significantly improves runtime and scalability compared to previous methods. Our approach ensures that each iteration yields the optimal decision tree. Experimental results on standard benchmarks demonstrate that SPOT achieves substantial speedup and scales to larger MDPs with a significantly higher number of states. The resulting decision tree policies are interpretable and compact, maintaining transparency without compromising performance. These results demonstrate that our approach simultaneously achieves interpretability and scalability, delivering high-quality policies an order of magnitude faster than existing approaches.