OpticFusion: Multi-Modal Neural Implicit 3D Reconstruction of Microstructures by Fusing White Light Interferometry and Optical MicroscopyShuo Chen, Yijin Li, Guofeng Zhang
White Light Interferometry (WLI) is a precise optical tool for measuring the 3D topography of microstructures. However, conventional WLI cannot capture the natural color of a sample's surface, which is essential for many microscale research applications that require both 3D geometry and color information. Previous methods have attempted to overcome this limitation by modifying WLI hardware and analysis software, but these solutions are often costly. In this work, we address this challenge from a computer vision multi-modal reconstruction perspective for the first time. We introduce OpticFusion, a novel approach that uses an additional digital optical microscope (OM) to achieve 3D reconstruction with natural color textures using multi-view WLI and OM images. Our method employs a two-step data association process to obtain the poses of WLI and OM data. By leveraging the neural implicit representation, we fuse multi-modal data and apply color decomposition technology to extract the sample's natural color. Tested on our multi-modal dataset of various microscale samples, OpticFusion achieves detailed 3D reconstructions with color textures. Our method provides an effective tool for practical applications across numerous microscale research fields. The source code and our real-world dataset are available at https://github.com/zju3dv/OpticFusion.
5.1IVAug 5, 2025
Neural Field-Based 3D Surface Reconstruction of Microstructures from Multi-Detector Signals in Scanning Electron MicroscopyShuo Chen, Yijin Li, Xi Zheng et al.
The scanning electron microscope (SEM) is a widely used imaging device in scientific research and industrial applications. Conventional two-dimensional (2D) SEM images do not directly reveal the three-dimensional (3D) topography of micro samples, motivating the development of SEM 3D surface reconstruction methods. However, reconstruction of complex microstructures remains challenging for existing methods due to the limitations of discrete 3D representations, the need for calibration with reference samples, and shadow-induced gradient errors. Here, we introduce NFH-SEM, a neural field-based hybrid SEM 3D reconstruction method that takes multi-view, multi-detector 2D SEM images as input and fuses geometric and photometric information into a continuous neural field representation. NFH-SEM eliminates the manual calibration procedures through end-to-end self-calibration and automatically disentangles shadows from SEM images during training, enabling accurate reconstruction of intricate microstructures. We validate the effectiveness of NFH-SEM on real and simulated datasets. Our experiments show high-fidelity reconstructions of diverse, challenging samples, including two-photon lithography microstructures, peach pollen, and silicon carbide particle surfaces, demonstrating precise detail and broad applicability.