Kang Liu

Xiaoxiao Liang, Haoyu Yang, Kang Liu et al.

Optical proximity correction (OPC) is a vital step to ensure printability in modern VLSI manufacturing. Various OPC approaches based on machine learning have been proposed to pursue performance and efficiency, which are typically data-driven and hardly involve any particular considerations of the OPC problem, leading to potential performance or efficiency bottlenecks. In this paper, we propose CAMO, a reinforcement learning-based OPC system that specifically integrates important principles of the OPC problem. CAMO explicitly involves the spatial correlation among the movements of neighboring segments and an OPC-inspired modulation for movement action selection. Experiments are conducted on both via layer patterns and metal layer patterns. The results demonstrate that CAMO outperforms state-of-the-art OPC engines from both academia and industry.

Ang Chen, Bifeng Song, Zhihe Wang et al.

Flying vertebrates exhibit sophisticated wingbeat kinematics. Their specialized forelimbs allow for the wing morphing motion to couple with the flapping motion during their level flight, Previous flyable bionic platforms have successfully applied bio-inspired wing morphing but cannot yet be propelled by the morphing-coupled wingbeat pattern. Spurred by this, we develop a bio-inspired flapping-wing aerial vehicle (FWAV) entitled RoboFalcon, which is equipped with a novel mechanism to drive the bat-style morphing wings, performs a morphing-coupled wingbeat pattern, and overall manages an appealing flight. The novel mechanism of RoboFalcon allows coupling the morphing and flapping during level flight and decoupling these when maneuvering is required, producing a bilateral asymmetric downstroke affording high rolling agility. The bat-style morphing wing is designed with a tilted mounting angle around the radius at the wrist joint to mimic the wrist supination and pronation effect of flying vertebrates' forelimbs. The agility of RoboFalcon is assessed through several rolling maneuver flight tests, and we demonstrate its well-performing agility capability compared to flying creatures and current flapping-wing platforms. Wind tunnel tests indicate that the roll moment of the asymmetric downstroke is correlated with the flapping frequency, and the wrist mounting angle can be used for tuning the angle of attack and lift-thrust configuration of the equilibrium flight state. We believe that this work yields a well-performing bionic platform and provides a new actuation strategy for the morphing-coupled flapping flight.