Wenqian Zhao

Wenqian Zhao, Qi Sun, Yang Bai et al.

Recent years have witnessed impressive progress in super-resolution (SR) processing. However, its real-time inference requirement sets a challenge not only for the model design but also for the on-chip implementation. In this paper, we implement a full-stack SR acceleration framework on embedded GPU devices. The special dictionary learning algorithm used in SR models was analyzed in detail and accelerated via a novel dictionary selective strategy. Besides, the hardware programming architecture together with the model structure is analyzed to guide the optimal design of computation kernels to minimize the inference latency under the resource constraints. With these novel techniques, the communication and computation bottlenecks in the deep dictionary learning-based SR models are tackled perfectly. The experiments on the edge embedded NVIDIA NX and 2080Ti show that our method outperforms the state-of-the-art NVIDIA TensorRT significantly, and can achieve real-time performance.

Wenqian Zhao, Xufeng Yao, Ziyang Yu et al.

Optical proximity correction (OPC) is a widely-used resolution enhancement technique (RET) for printability optimization. Recently, rigorous numerical optimization and fast machine learning are the research focus of OPC in both academia and industry, each of which complements the other in terms of robustness or efficiency. We inspect the pattern distribution on a design layer and find that different sub-regions have different pattern complexity. Besides, we also find that many patterns repetitively appear in the design layout, and these patterns may possibly share optimized masks. We exploit these properties and propose a self-adaptive OPC framework to improve efficiency. Firstly we choose different OPC solvers adaptively for patterns of different complexity from an extensible solver pool to reach a speed/accuracy co-optimization. Apart from that, we prove the feasibility of reusing optimized masks for repeated patterns and hence, build a graph-based dynamic pattern library reusing stored masks to further speed up the OPC flow. Experimental results show that our framework achieves substantial improvement in both performance and efficiency.

Zixiao Wang, Yunheng Shen, Wenqian Zhao et al.

Deep generative models dominate the existing literature in layout pattern generation. However, leaving the guarantee of legality to an inexplicable neural network could be problematic in several applications. In this paper, we propose \tool{DiffPattern} to generate reliable layout patterns. \tool{DiffPattern} introduces a novel diverse topology generation method via a discrete diffusion model with compute-efficiently lossless layout pattern representation. Then a white-box pattern assessment is utilized to generate legal patterns given desired design rules. Our experiments on several benchmark settings show that \tool{DiffPattern} significantly outperforms existing baselines and is capable of synthesizing reliable layout patterns.

Zixiao Wang, Yunheng Shen, Xufeng Yao et al.

Existing works focus on fixed-size layout pattern generation, while the more practical free-size pattern generation receives limited attention. In this paper, we propose ChatPattern, a novel Large-Language-Model (LLM) powered framework for flexible pattern customization. ChatPattern utilizes a two-part system featuring an expert LLM agent and a highly controllable layout pattern generator. The LLM agent can interpret natural language requirements and operate design tools to meet specified needs, while the generator excels in conditional layout generation, pattern modification, and memory-friendly patterns extension. Experiments on challenging pattern generation setting shows the ability of ChatPattern to synthesize high-quality large-scale patterns.