Haoyu Yang

Haoyu Yang, Zongyi Li, Kumara Sastry et al.

Machine learning techniques have been extensively studied for mask optimization problems, aiming at better mask printability, shorter turnaround time, better mask manufacturability, and so on. However, most of these researches are focusing on the initial solution generation of small design regions. To further realize the potential of machine learning techniques on mask optimization tasks, we present a Convolutional Fourier Neural Operator (CFNO) that can efficiently learn layout tile dependencies and hence promise stitch-less large-scale mask optimization with the limited intervention of legacy tools. We discover the possibility of litho-guided self-training (LGST) through a trained machine learning model when solving non-convex optimization problems, which allows iterative model and dataset update and brings significant model performance improvement. Experimental results show that, for the first time, our machine learning-based framework outperforms state-of-the-art academic numerical mask optimizers with an order of magnitude speedup.

Mingjie Liu, Haoyu Yang, Zongyi Li et al.

Lithography modeling is a crucial problem in chip design to ensure a chip design mask is manufacturable. It requires rigorous simulations of optical and chemical models that are computationally expensive. Recent developments in machine learning have provided alternative solutions in replacing the time-consuming lithography simulations with deep neural networks. However, the considerable accuracy drop still impedes its industrial adoption. Most importantly, the quality and quantity of the training dataset directly affect the model performance. To tackle this problem, we propose a litho-aware data augmentation (LADA) framework to resolve the dilemma of limited data and improve the machine learning model performance. First, we pretrain the neural networks for lithography modeling and a gradient-friendly StyleGAN2 generator. We then perform adversarial active sampling to generate informative and synthetic in-distribution mask designs. These synthetic mask images will augment the original limited training dataset used to finetune the lithography model for improved performance. Experimental results demonstrate that LADA can successfully exploits the neural network capacity by narrowing down the performance gap between the training and testing data instances.

Guojin Chen, Zehua Pei, Haoyu Yang et al.

Lithography is fundamental to integrated circuit fabrication, necessitating large computation overhead. The advancement of machine learning (ML)-based lithography models alleviates the trade-offs between manufacturing process expense and capability. However, all previous methods regard the lithography system as an image-to-image black box mapping, utilizing network parameters to learn by rote mappings from massive mask-to-aerial or mask-to-resist image pairs, resulting in poor generalization capability. In this paper, we propose a new ML-based paradigm disassembling the rigorous lithographic model into non-parametric mask operations and learned optical kernels containing determinant source, pupil, and lithography information. By optimizing complex-valued neural fields to perform optical kernel regression from coordinates, our method can accurately restore lithography system using a small-scale training dataset with fewer parameters, demonstrating superior generalization capability as well. Experiments show that our framework can use 31% of parameters while achieving 69$\times$ smaller mean squared error with 1.3$\times$ higher throughput than the state-of-the-art.

Qinghe Gao, Haoyu Yang, Shachi M. Shanbhag et al.

Process design is a creative task that is currently performed manually by engineers. Artificial intelligence provides new potential to facilitate process design. Specifically, reinforcement learning (RL) has shown some success in automating process design by integrating data-driven models that learn to build process flowsheets with process simulation in an iterative design process. However, one major challenge in the learning process is that the RL agent demands numerous process simulations in rigorous process simulators, thereby requiring long simulation times and expensive computational power. Therefore, typically short-cut simulation methods are employed to accelerate the learning process. Short-cut methods can, however, lead to inaccurate results. We thus propose to utilize transfer learning for process design with RL in combination with rigorous simulation methods. Transfer learning is an established approach from machine learning that stores knowledge gained while solving one problem and reuses this information on a different target domain. We integrate transfer learning in our RL framework for process design and apply it to an illustrative case study comprising equilibrium reactions, azeotropic separation, and recycles, our method can design economically feasible flowsheets with stable interaction with DWSIM. Our results show that transfer learning enables RL to economically design feasible flowsheets with DWSIM, resulting in a flowsheet with an 8% higher revenue. And the learning time can be reduced by a factor of 2.

Haoyu Yang, Anthony Agnesina, Haoxing Ren

Exploding predictive AI has enabled fast yet effective evaluation and decision-making in modern chip physical design flows. State-of-the-art frameworks typically include the objective of minimizing the mean square error (MSE) between the prediction and the ground truth. We argue the averaging effect of MSE induces limitations in both model training and deployment, and good MSE behavior does not guarantee the capability of these models to assist physical design flows which are likely sabotaged due to a small portion of prediction error. To address this, we propose mini-pixel batch gradient descent (MPGD), a plug-and-play optimization algorithm that takes the most informative entries into consideration, offering probably faster and better convergence. Experiments on representative benchmark suits show the significant benefits of MPGD on various physical design prediction tasks using CNN or Graph-based models.

Xiaowei Jia, Shengyu Chen, Yiqun Xie et al.

This paper proposes a new data-driven method for predicting water temperature in stream networks with reservoirs. The water flows released from reservoirs greatly affect the water temperature of downstream river segments. However, the information of released water flow is often not available for many reservoirs, which makes it difficult for data-driven models to capture the impact to downstream river segments. In this paper, we first build a state-aware graph model to represent the interactions amongst streams and reservoirs, and then propose a parallel learning structure to extract the reservoir release information and use it to improve the prediction. In particular, for reservoirs with no available release information, we mimic the water managers' release decision process through a pseudo-prospective learning method, which infers the release information from anticipated water temperature dynamics. For reservoirs with the release information, we leverage a physics-based model to simulate the water release temperature and transfer such information to guide the learning process for other reservoirs. The evaluation for the Delaware River Basin shows that the proposed method brings over 10\% accuracy improvement over existing data-driven models for stream temperature prediction when the release data is not available for any reservoirs. The performance is further improved after we incorporate the release data and physical simulations for a subset of reservoirs.

Guanxiong Chen, Haoyu Yang, Ian M. Mitchell

We introduce ROS-X-Habitat, a software interface that bridges the AI Habitat platform for embodied learning-based agents with other robotics resources via ROS. This interface not only offers standardized communication protocols between embodied agents and simulators, but also enables physically and photorealistic simulation that benefits the training and/or testing of vision-based embodied agents. With this interface, roboticists can evaluate their own Habitat RL agents in another ROS-based simulator or use Habitat Sim v2 as the test bed for their own robotic algorithms. Through in silico experiments, we demonstrate that ROS-X-Habitat has minimal impact on the navigation performance and simulation speed of a Habitat RGBD agent; that a standard set of ROS mapping, planning and navigation tools can run in Habitat Sim v2; and that a Habitat agent can run in the standard ROS simulator Gazebo.