Zhongming Wei

Chao Shen, Wenkang Zhan, Kaiyao Xin et al.

Self-assembled InAs/GaAs quantum dots (QDs) have properties highly valuable for developing various optoelectronic devices such as QD lasers and single photon sources. The applications strongly rely on the density and quality of these dots, which has motivated studies of the growth process control to realize high-quality epi-wafers and devices. Establishing the process parameters in molecular beam epitaxy (MBE) for a specific density of QDs is a multidimensional optimization challenge, usually addressed through time-consuming and iterative trial-and-error. Here, we report a real-time feedback control method to realize the growth of QDs with arbitrary density, which is fully automated and intelligent. We developed a machine learning (ML) model named 3D ResNet 50 trained using reflection high-energy electron diffraction (RHEED) videos as input instead of static images and providing real-time feedback on surface morphologies for process control. As a result, we demonstrated that ML from previous growth could predict the post-growth density of QDs, by successfully tuning the QD densities in near-real time from 1.5E10 cm-2 down to 3.8E8 cm-2 or up to 1.4E11 cm-2. Compared to traditional methods, our approach, with in situ tuning capabilities and excellent reliability, can dramatically expedite the material optimization process and improve the reproducibility of MBE, constituting significant progress for thin film growth techniques. The concepts and methodologies proved feasible in this work are promising to be applied to a variety of material growth processes, which will revolutionize semiconductor manufacturing for optoelectronic and microelectronic industries.

Jiabei Chen, Liping Zhang, Jiang-Bin Wu et al.

The precise pixel-level localization of 2D material flakes is crucial for high-throughput screening. However, traditional fully supervised methods rely on dense annotations, which are costly and time-consuming, severely limiting the practical deployment of segmentation models. This paper proposes TACoS, a specialized scribble segmentation framework tailored for 2D materials. First, we design a unified framework that integrates semi-supervised consistency learning with structured tree energy constraints. This framework comprises two core components: an unlabeled weak-strong distribution alignment module and a tree energy regularization module. The former employs cosine consistency constraints to enhance prediction alignment across views. Meanwhile, the latter utilizes minimum spanning trees to establish pixel affinity relationships and generate structure-aware soft pseudo labels for online semantic guidance. Next, we introduce asymmetric regional contrast learning. This approach fuses high-confidence predictions from the weak augmentation branch with scribbles to form augmented labels, and construct category prototypes in the representation space. Simultaneously, we prioritize contrastive constraints on challenging pixels in boundary-unlabeled regions. This strategy enhances intra-class cohesion and inter-class separation at the representation level, effectively reducing category confusion in low-contrast edges and complex backgrounds. Experiments conducted on the constructed graphene and MoS2 datasets demonstrate that our method TACoS achieves over 96% of fully supervised performance using less than 0.6% annotated data. Furthermore, it exhibits superior structural coherence and boundary stability in scenarios with weakly contrasting edges and complex backgrounds, providing an efficient and scalable solution for automated high-throughput screening of 2D material flakes.