Haoyu Yang

Guojin Chen, Haoyu Yang, Haoxing Ren et al.

Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based OPC, termed as inverse lithography technology (ILT), has gained research interest due to its flexibility and precision. Its complexity and intricate features can lead to challenges in mask writing, increased defects, and higher costs, hence hindering widespread industrial adoption. In this paper, we propose DiffOPC, a differentiable OPC framework that enjoys the virtue of both edge-based OPC and ILT. By employing a mask rule-aware gradient-based optimization approach, DiffOPC efficiently guides mask edge segment movement during mask optimization, minimizing wafer error by propagating true gradients from the cost function back to the mask edges. Our approach achieves lower edge placement error while reducing manufacturing cost by half compared to state-of-the-art OPC techniques, bridging the gap between the high accuracy of pixel-based OPC and the practicality required for industrial adoption, thus offering a promising solution for advanced semiconductor manufacturing.

Yuxin Qiao, Keqin Li, Junhong Lin et al.

In multi-label classification, machine learning encounters the challenge of domain generalization when handling tasks with distributions differing from the training data. Existing approaches primarily focus on vision object recognition and neglect the integration of natural language. Recent advancements in vision-language pre-training leverage supervision from extensive visual-language pairs, enabling learning across diverse domains and enhancing recognition in multi-modal scenarios. However, these approaches face limitations in loss function utilization, generality across backbones, and class-aware visual fusion. This paper proposes solutions to these limitations by inferring the actual loss, broadening evaluations to larger vision-language backbones, and introducing Mixup-CLIPood, which incorporates a novel mix-up loss for enhanced class-aware visual fusion. Our method demonstrates superior performance in domain generalization across multiple datasets.

Haoyu Yang, Zheng Zhang, Saket Sathe

Large language models, such as ChatGPT, Claude, or LLaMA, are gigantic, monolithic, and possess the superpower to simultaneously support thousands of tasks. However, high-throughput applications often prefer smaller task-specific models because of their lower latency and cost. One challenge of using task-specific models is the incremental need for solving newer tasks after the model is already deployed for existing tasks. A straightforward solution requires fine-tuning the model again for both existing and new tasks, which is computationally expensive and time-consuming. To address this issue, we propose a model merging based approach called SUPERMERGE. SUPERMERGE is a gradient-based method to systematically merge several fine-tuned models trained on existing and new tasks. SUPERMERGE is designed to be lightweight and fast, and the merged model achieves similar performance to fully fine-tuned models on all tasks. Furthermore, we proposed a hierarchical model merging strategy to reduce the peak space requirement without sacrificing the performance of the merged model. We experimentally demonstrate that SUPERMERGE outperforms existing model merging methods on common natural language processing and computer vision tasks.