Nullspace-based Fault Diagnosis for Closed-Loop Mechatronic Systems with Application to Semiconductor Equipment
For engineers designing FDI systems for mechatronic production equipment, this work provides tailored synthesis conditions validated on a real system, though it is an incremental extension of existing methods.
The paper addresses closed-loop fault detection and isolation for mechatronic systems, applying nullspace-based FDI synthesis conditions to a wafer stage prototype with real experiments demonstrating effectiveness.
Fault detection and isolation (FDI) systems are critical for modern mechatronic production equipment, as their continuous operation is heavily dependent on the ability to detect and isolate faults in a timely and efficient manner. The aim of this paper is to address closed-loop aspects for linear systems and enable the application of well-known nullspace-based FDI synthesis conditions to mechatronic systems subject to actuator and sensor faults. These tailored FDI synthesis conditions are applied to a large-scale prototype wafer stage, showcasing the proposed approach through real experiments, thereby underlining the usefulness of the derived synthesis conditions for a wide range of production machines and scientific instruments.