Koen Classens

h-index6
2papers
136citations

2 Papers

7.4SYMay 10
Nullspace-based Fault Diagnosis for Closed-Loop Mechatronic Systems with Application to Semiconductor Equipment

Koen Classens, Jeroen van de Wijdeven, Maurice Heemels et al.

Fault detection and isolation (FDI) systems are critical for modern mechatronic production equipment, as their continuous operation is heavily dependent on the ability to detect and isolate faults in a timely and efficient manner. The aim of this paper is to address closed-loop aspects for linear systems and enable the application of well-known nullspace-based FDI synthesis conditions to mechatronic systems subject to actuator and sensor faults. These tailored FDI synthesis conditions are applied to a large-scale prototype wafer stage, showcasing the proposed approach through real experiments, thereby underlining the usefulness of the derived synthesis conditions for a wide range of production machines and scientific instruments.

0.5SYJun 15
Closed-loop Optimal Fault Detection for Uncertain Systems

Koen Classens, Tjeerd Ickenroth, Jeroen van de Wijdeven et al.

Faults compromise the reliability and safety of complex engineering systems. The aim of this article is to address the problem of robust fault detection filter design for continuous-time linear time-invariant uncertain systems in open-loop or closed-loop configurations. The developed method offers a unified approach to handle parametric and dynamic uncertainties by solving a single Riccati equation, based on a worst-case disturbance and uncertainty model. This worst-case model is obtained by nonlinear optimization and application of the boundary Nevanlinna-Pick method. The efficacy of the proposed approach is demonstrated using an uncertain model of an experimental reticle stage used in the lithography industry. The results illustrate that an optimal compromise is achieved between sensitivity to faults and rejection of modelling uncertainties and disturbances on the other hand. This capability enables the clear differentiation between faults and undesired effects in residuals, thereby enhancing fault detection reliability, ultimately contributing to improved safety and performance of machines.