Adaptive Bayesian Optimization for High-Precision Motion Systems
This work addresses real-time adaptive control for precision-motion systems in semiconductor manufacturing, representing an incremental improvement over existing Bayesian optimization methods.
The paper tackles the problem of computationally expensive Bayesian optimization for real-time controller tuning in high-precision motion systems, proposing modifications to the GoOSE algorithm that achieve improved computational efficiency and parallelization.
Controller tuning and parameter optimization are crucial in system design to improve closed-loop system performance. Bayesian optimization has been established as an efficient model-free controller tuning and adaptation method. However, Bayesian optimization methods are computationally expensive and therefore difficult to use in real-time critical scenarios. In this work, we propose a real-time purely data-driven, model-free approach for adaptive control, by online tuning low-level controller parameters. We base our algorithm on GoOSE, an algorithm for safe and sample-efficient Bayesian optimization, for handling performance and stability criteria. We introduce multiple computational and algorithmic modifications for computational efficiency and parallelization of optimization steps. We further evaluate the algorithm's performance on a real precision-motion system utilized in semiconductor industry applications by modifying the payload and reference stepsize and comparing it to an interpolated constrained optimization-based baseline approach.